UV Flat Mirrors

UV Flat Mirrors for harmonic-generation outputs of Nd:YAG and Yb-doped lasers, including 193 nm ArF, 213 nm, 266 nm, 343 nm, and 355 nm operation. The IBS dielectric coating delivers >99 % reflectance at the design wavelength while resisting the cumulative fluence common in DUV inspection and UV processing systems.

UVFS substrates polished to laser-grade surface quality with low surface roughness. 30 products available with 0°, 28-32°, 42-48°, and 45° angles of incidence.

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