DR Laser

Kleave Series — Laser Wafer Dicing Platform

KLEAVE
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DR Laser · Semiconductor · Advanced Display · Production-scale equipment

Applications

  • MEMS & Sensors (accelerometers, gyroscopes, pressure sensors)
  • RF Devices & SAW Filters
  • MiniLED / MicroLED & sapphire substrates
  • Logic IC / HBM 2.5D advanced packaging
  • Low-k & fragile material processing (GaAs, SiC)
  • DBG, DAF, mold/resin package dicing
  • Glass / silicon bonded wafer singulation

Technical Notes

  • Track record: 5,000+ nanosecond laser equipment shipped; 2,000+ picosecond units shipped (DR Laser disclosure).
  • Source: DR Laser Kleave Series brochure (2025, lite version). Download the brochure from the Documents tab for full details.
This is a quoted product. Pricing, lead time, and final configuration depend on substrate, throughput, and integration requirements. Use the Contact Sales button to start an RFQ — WaveQuanta acts as DR Laser's regional partner and will route your inquiry to the BD team in Singapore.
ModelsKleave Series
Process TypeInternal Dicing / Surface Scribe & Grooving / Full Cut
Laser Source ArchitectureFlexiCore — multi-engine: IR / Green / UV / DUV
Pulse Width Optionsns / ps / fs (ultrafast cold cutting)
Supported SubstratesSilicon · Sapphire · GaAs · SiC · Lithium Niobate · Lithium Tantalate · Glass
Beam SynchronizationSynchroCut — real-time vision + stage alignment, multi-street cutting
AutofocusSmartFocus 3D — multi-axis wafer bow & thickness compensation
Vision ControlPrecision Vision Suite — in-line groove width detection + warpage correction
Recipe & SPC Softwarezwave — full versioning, lot/wafer linkage, Cpk/Ppk dashboards
Fab IntegrationFabLink — SECS/GEM, OPC UA, REST APIs, multi-site tenancy, OIDC/SSO
CustomizationConfigurable; consult R&D team
Track record: 5,000+ nanosecond laser equipment shipped; 2,000+ picosecond units shipped (DR Laser disclosure).
Source: DR Laser Kleave Series brochure (2025, lite version). Download the brochure from the Documents tab for full details.

Source: DR Laser manufacturer datasheet. Download the brochure (PDF) from the Documents tab for full details.

No CAD drawings available for this product.