DR Laser

ThruGlas CE-510 — Panel-Level Wet Etching (TGV)

TG-CE-510
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DR Laser · Semiconductor · Advanced Display · Production-scale equipment

Applications

  • Panel-level wet etching (LACE step 2)
  • Glass interposers · Glass core substrates
  • Mini/Micro LED panel manufacturing

Technical Notes

  • Operation flow: Load cassette → Vacuum & wetting → Single-chamber etching & QDR rinsing → FR ultrasonic cleaning → Heated N₂ drying → Unload.
  • Chemistry tuned under DR Laser's LACE technology for uniform panel-scale etching.
  • Source: DR Laser ThruGlas brochure (2025).
This is a quoted product. Pricing, lead time, and final configuration depend on substrate, throughput, and integration requirements. Use the Contact Sales button to start an RFQ — WaveQuanta acts as DR Laser's regional partner and will route your inquiry to the BD team in Singapore.
Related Reading — Strategic Intelligence Through-Glass Vias & Glass-Core Substrates — The Glass Interconnect Stack (2026 Report)

106-page deep-dive on the TGV technology chain, 60+ players across US/EU/Japan/Korea/China/Taiwan, reconciled market models, and an investment / partner / buy / pass framework — strategic context for evaluating ThruGlas equipment in your roadmap.

ModelsThruGlas CE-510
Process LevelPanel-level wet etching
Substrate MaterialQuartz / Schott BF33 / AF32 / Corning EXG / Corning SG3.4
Substrate Size650 × 650 mm
Substrate Thickness0.1–1.1 mm
Loading / UnloadingManual, trolley / cart
Main BuildHigh-strength SUS304 frame; acid & alkali resistant PP cover
Etching ChamberCirculation, overflow, automatic refilling (low-fluid level)
Wetting ModuleUltrasonic + Vacuum + Overflow
Rinsing ModuleQDR: top-spray, base water submerge
FR Module80 / 120 kHz, adjustable power
Discharge / RefillAutomatic mode available
Footprint (L×W×H)4300 × 2300 × 2700 mm (customisable on request)
Pass-line1000 ± 20 mm
Electrical3-phase 380 V, 50 Hz
Waste DischargeFacility-connected, or independent tank storage
Operation flow: Load cassette → Vacuum & wetting → Single-chamber etching & QDR rinsing → FR ultrasonic cleaning → Heated N₂ drying → Unload.
Chemistry tuned under DR Laser's LACE technology for uniform panel-scale etching.
Source: DR Laser ThruGlas brochure (2025).

Source: DR Laser manufacturer datasheet. Download the brochure (PDF) from the Documents tab for full details.

No CAD drawings available for this product.
dr-laser-thruglas-ce-510 — thruglas p18 bf33 micrographs
dr-laser-thruglas-ce-510 — thruglas p18 bf33 micrographs

Product Family: TGV Micro-Drilling Equipment — ThruGlas Series (6 variants)