DR Laser

ThruGlas LA-300 — Wafer-Level Laser Modification (TGV)

TG-LA-300
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DR Laser · Semiconductor · Advanced Display · Production-scale equipment

Applications

  • Glass interposers · Glass core substrates
  • Mini/Micro LED
  • 2.5D advanced packaging — LACE pre-step for TGV formation

Technical Notes

  • Two-step LACE process: (1) ultrafast Bessel-beam modification → (2) wet etching (CE-300). Pair with ThruGlas CE-300 + INS-300 for full wafer-level TGV line.
  • Capabilities (LACE): aspect ratio up to 100:1, taper < 0.1°, Ra < 100 nm, circularity > 95 %, 100 % through-hole detection.
  • Source: DR Laser ThruGlas brochure (2025). Custom configurations available — consult R&D.
This is a quoted product. Pricing, lead time, and final configuration depend on substrate, throughput, and integration requirements. Use the Contact Sales button to start an RFQ — WaveQuanta acts as DR Laser's regional partner and will route your inquiry to the BD team in Singapore.
Related Reading — Strategic Intelligence Through-Glass Vias & Glass-Core Substrates — The Glass Interconnect Stack (2026 Report)

106-page deep-dive on the TGV technology chain, 60+ players across US/EU/Japan/Korea/China/Taiwan, reconciled market models, and an investment / partner / buy / pass framework — strategic context for evaluating ThruGlas equipment in your roadmap.

ModelsThruGlas LA-300
Process LevelWafer-level — 300×300 mm, up to 12-inch
Laser SourceCustomised Ultrafast Laser (Bessel beam)
Substrate Size4″–12″ wafer & panel
Substrate Thickness0.1–1.1 mm
Loading / Unloading4″–12″ cassette, automated
Processing MethodFixed laser + high-precision mechanical platform
Processing Speed800 mm/s
Positioning Accuracy≤ ±1 μm
Repeatability≤ ±0.75 μm
Pattern Placement Accuracy≤ ±3 μm (across 300 mm)
Footprint (L×W×H)2800 × 2300 × 2300 mm
Weight≤ 5 tons
Drawing File FormatDXF
Two-step LACE process: (1) ultrafast Bessel-beam modification → (2) wet etching (CE-300). Pair with ThruGlas CE-300 + INS-300 for full wafer-level TGV line.
Capabilities (LACE): aspect ratio up to 100:1, taper < 0.1°, Ra < 100 nm, circularity > 95 %, 100 % through-hole detection.
Source: DR Laser ThruGlas brochure (2025). Custom configurations available — consult R&D.

Source: DR Laser manufacturer datasheet. Download the brochure (PDF) from the Documents tab for full details.

No CAD drawings available for this product.
dr-laser-thruglas-la-300 — thruglas p18 bf33 micrographs
dr-laser-thruglas-la-300 — thruglas p18 bf33 micrographs

Product Family: TGV Micro-Drilling Equipment — ThruGlas Series (6 variants)