Single-axis Scanning Micromirrors MEMS-1.3-1.15K

The single-axis scanning micromirror provided by LBTEK is a chip based on MEMS technology, where the MEMS-1.3-1.15K is electrostatically driven and the MEMS-12-0.2K is electromagnetically driven. Under the action of the driving signal, the micromirror performs resonant torsional motion around the torsion beam to achieve the effect of single-axis scanning. The micromirror is processed from single-crystal silicon and coated with a metal film on the mirror surface to increase reflectivity. The mirror itself is supported by torsion beams and performs resonant motion under the driving signal (it cannot stop at a certain angle, and the frequency cannot be adjusted). For product parameters and usage, users can download the manual for reference. Note: To extend the product's service life, minimize the number of insertions and removals between the development board and the flexible cable of the single-axis scanning micromirror during use to avoid damaging the data interface (once damaged, it cannot be repaired).