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Dhyana 9KTDI Pro BSI TDI sCMOS Line-Scan Camera, 600 kHz at 9K, 256 Stages
Dhyana 9KTDI ProContact for pricing
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A cooled BSI TDI camera for UV-to-NIR low-light line scanning in semiconductor and life-science inspection.
The Dhyana 9KTDI Pro combines back-thinned sCMOS technology with time delay integration (TDI) of up to 256 stages and covers 180 nm to 1100 nm. Its 9072-pixel line of 5 µm pixels runs at up to 600 kHz over a CoaXPress-over-Fiber link, while stable cooling keeps the background uniform. It is aimed at wafer and material defect inspection and gene sequencing, and a Pro-UV version with a deep-UV sensor is also offered.
Key Features
- Two versions: Dhyana 9KTDI Pro (GLT5009BSI, 82% QE at 550 nm) and Dhyana 9KTDI Pro-UV (GLT5009BSI-DUV, 50% QE at 266 nm)
- Spectral response from 180 to 1100 nm for UV (such as 193, 266 and 355 nm), visible and near-infrared imaging
- Selectable TDI stages from 4 to 256 to raise signal-to-noise ratio in low-light scanning
- 600 kHz line rate at 8 and 10 bit (299 kHz at 12 bit), about 5400 Mpixel/s, over 10× a typical sCMOS camera at 100 fps and 4.2 MP
- CoaXPress-over-Fiber interface via QSFP+
- Air or liquid cooling: 20°C below ambient or 35°C below water temperature, for low dark noise and stable data
- CTE ≥ 0.99993; TDI and area modes; forward, reverse or trigger-controlled scan direction
Typical Applications
- Semiconductor wafer defect inspection
- Semiconductor material defect detection
- Flat-panel display (FPD) inspection
- UV line-scan inspection
- Gene sequencing
Related Products
- Dhyana 9KTDI — BSI TDI sCMOS Line-Scan Camera, 510 kHz at 9K, CXP-12
- Gemini 16KTDI — BSI TDI sCMOS Line-Scan Camera, 500 kHz at 16K, 100G CoF
- Gemini 8KTDI LT — Compact TDI sCMOS Line-Scan Camera, 500 kHz at 8K, CXP-12
Browse all: TDI Line-Scan Cameras · Cameras
Model: Dhyana 9KTDI Pro · Acquisition software and drivers are supplied with the camera. Contact WaveQuanta for a quote and lead time.
| Sensor Type | BSI sCMOS TDI |
| Sensor | GLT5009BSI (Pro); GLT5009BSI-DUV (Pro-UV) |
| Color / Mono | Mono |
| Peak QE (Pro) | 82% @ 550 nm; 50% @ 350 nm; 38% @ 800 nm |
| Peak QE (Pro-UV) | 50% @ 266 nm |
| Spectral Range | 180 nm to 1100 nm |
| Resolution | 9072 (H) × 256 (V) |
| Pixel Size | 5 µm × 5 µm |
| Effective Area | 45.36 mm × 1.28 mm |
| Array Diagonal | 45.4 mm |
| Full-Well Capacity | 14 ke⁻ @ 10 bit and 12 bit (typical) |
| Readout Noise | 10.5 e⁻ @ 10 bit; 6.2 e⁻ @ 12 bit (typical) |
| Dynamic Range | 63.6 dB @ 10 bit; 68 dB @ 12 bit (typical) |
| Line Rate (TDI) | 600 kHz @ 8 bit and 10 bit; 299 kHz @ 12 bit |
| TDI Stages | 4, 8, 16, 32, 64, 96, 128, 160, 192, 224, 240, 248, 252, 256 |
| Operation Mode | TDI, area; scan direction forward, reverse or trigger-controlled |
| Binning | 1 × 2 (sensor); 2 × 2, 4 × 4, 8 × 8 (FPGA) |
| ROI | Supported |
| Cooling Method | Air cooling, liquid cooling |
| Cooling Temperature | 20°C below ambient (at 20°C); 35°C below water temperature (at 20°C) |
| DSNU / PRNU | 4 e⁻ @ 10 bit, 1.6 e⁻ @ 12 bit / 0.3% (typical) |
| Bit Depth | 8 bit, 10 bit, 12 bit |
| Data Interface | QSFP+ (CoaXPress-over-Fiber) |
| Trigger | Trigger input, scan direction input; strobe output (Hirose HR10A-7R-4S) |
| Optical Interface | M72; customization available |
| Power Supply | 12 V / 8 A |
| Power Consumption | < 75 W |
| Dimensions | 100 mm × 100 mm × 145 mm (H × W × L) |
| Weight | 1800 g |
| Operating Environment | Working: 0°C to 40°C, 0–85% RH; storage: 0°C to 60°C, 0–90% RH |
| Software / SDK | C++ SDK (GenICam standard); Windows, Linux |
No CAD drawings available for this product.
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Product Family: TDI Line-Scan Cameras (5 variants)
| Product | SKU | Size | Clear Aperture | Operating Wavelength | |
|---|---|---|---|---|---|
| Gemini 8KTDI BSI TDI sCMOS Line-Scan Camera, 1 MHz at 8K, 100G/40G CoF |
Gemini 8KTDI
| — | — | — | Contact |
| Gemini 16KTDI BSI TDI sCMOS Line-Scan Camera, 500 kHz at 16K, 100G CoF |
Gemini 16KTDI
| — | — | — | Contact |
| Gemini 8KTDI LT Compact TDI sCMOS Line-Scan Camera, 500 kHz at 8K, CXP-12 |
Gemini 8KTDI LT
| — | — | — | Contact |
| Dhyana 9KTDI BSI TDI sCMOS Line-Scan Camera, 510 kHz at 9K, CXP-12 |
Dhyana 9KTDI
| — | — | — | Contact |
| Dhyana 9KTDI Pro BSI TDI sCMOS Line-Scan Camera, 600 kHz at 9K, 256 Stages Current |
Dhyana 9KTDI Pro
| — | — | — |