Dhyana 9KTDI Back-illuminated TDI sCMOS line-scan camera
WaveQuanta

Dhyana 9KTDI BSI TDI sCMOS Line-Scan Camera, 510 kHz at 9K, CXP-12

Dhyana 9KTDI
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A BSI TDI line-scan camera for fast, low-light inspection from ultraviolet to near-infrared.

The Dhyana 9KTDI applies back-thinned sCMOS technology to time delay integration, with up to 256 TDI stages on a 9072-pixel line of 5 µm pixels. It reaches 510 kHz at 8 bit over a CoaXPress 2.0 (CXP-12 × 4) interface and responds from 180 nm to 1100 nm. Wafer inspection, FPD inspection and other precision scanning tasks are typical uses.

Key Features

  • 82% QE at 550 nm, 51% at 355 nm and 38% at 266 nm
  • Spectral response from 180 to 1100 nm for UV, visible and near-infrared imaging
  • Selectable TDI stages from 4 to 256 for higher signal-to-noise ratio under limited light
  • Line rates of 510 kHz (8 bit), 345 kHz (10 bit) and 299 kHz (12 bit)
  • About 4590 Mpixel/s at 9K and 510 kHz, roughly 46× a back-illuminated TDI-CCD running 2K at 50 kHz (100 Mpixel/s)
  • CoaXPress 2.0 (CXP-12 × 4) interface; M72 optical mount, customization available
  • Air or liquid cooling in an 86 × 86 × 109 mm, 1100 g housing

Typical Applications

  • Semiconductor and wafer inspection
  • Flat-panel display (FPD) inspection
  • Fluorescence detection
  • Spectral analysis

Related Products

  • Dhyana 9KTDI Pro — BSI TDI sCMOS Line-Scan Camera, 600 kHz at 9K, 256 Stages
  • Gemini 16KTDI — BSI TDI sCMOS Line-Scan Camera, 500 kHz at 16K, 100G CoF
  • Gemini 8KTDI LT — Compact TDI sCMOS Line-Scan Camera, 500 kHz at 8K, CXP-12

Browse all: TDI Line-Scan Cameras · Cameras

Model: Dhyana 9KTDI · Acquisition software and drivers are supplied with the camera. Contact WaveQuanta for a quote and lead time.

Sensor Type BSI sCMOS TDI
Sensor GLT5009BSI
Color / Mono Mono
Peak QE 82% @ 550 nm; 51% @ 355 nm; 38% @ 266 nm; 38% @ 800 nm
Spectral Range 180 nm to 1100 nm
Resolution 9072 (H) × 256 (V)
Pixel Size 5 µm × 5 µm
Effective Area 45.36 mm × 1.28 mm
Array Diagonal 45.4 mm
Full-Well Capacity 10 ke⁻ @ 10 bit and 12 bit (typical)
Readout Noise 6.6 e⁻ @ 10 bit; 6.2 e⁻ @ 12 bit (typical)
Dynamic Range 63 dB @ 10 bit; 66 dB @ 12 bit (typical)
Line Rate (TDI) 510 kHz @ 8 bit; 345 kHz @ 10 bit; 299 kHz @ 12 bit
TDI Stages 4, 8, 16, 32, 64, 96, 128, 160, 192, 224, 240, 248, 252, 256
Operation Mode TDI, area; scan direction forward, reverse or trigger-controlled
Binning 1 × 2 (sensor); 2 × 2, 4 × 4, 8 × 8 (FPGA)
ROI Supported
Cooling Method Air cooling, liquid cooling
Cooling Temperature 20°C below ambient (at 20°C); 35°C below water temperature (at 20°C)
DSNU / PRNU 4 e⁻ @ 10 bit and 12 bit / 0.3% (typical)
Bit Depth 8 bit, 10 bit, 12 bit
Data Interface CoaXPress 2.0 (CXP-12 × 4)
Trigger Trigger input, scan direction input; strobe output (Hirose HR10A-7R-4S)
Optical Interface M72; customization available
Power Supply 12 V / 8 A
Power Consumption < 60 W
Dimensions 86 mm × 86 mm × 109 mm (H × W × L)
Weight 1100 g
Operating Environment Working: 0°C to 40°C, 0–85% RH; storage: 0°C to 60°C, 0–90% RH
Software / SDK C++ SDK (GenICam standard); Windows, Linux
Specification Sheet PDF — Download
No CAD drawings available for this product.
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Product Family: TDI Line-Scan Cameras (5 variants)

Product ▴▾ SKU Size ▴▾ Clear Aperture ▴▾ Operating Wavelength ▴▾
Gemini 8KTDI BSI TDI sCMOS Line-Scan Camera, 1 MHz at 8K, 100G/40G CoF Gemini 8KTDI — — —Contact
Gemini 16KTDI BSI TDI sCMOS Line-Scan Camera, 500 kHz at 16K, 100G CoF Gemini 16KTDI — — —Contact
Gemini 8KTDI LT Compact TDI sCMOS Line-Scan Camera, 500 kHz at 8K, CXP-12 Gemini 8KTDI LT — — —Contact
Dhyana 9KTDI BSI TDI sCMOS Line-Scan Camera, 510 kHz at 9K, CXP-12 Current Dhyana 9KTDI — — —
Dhyana 9KTDI Pro BSI TDI sCMOS Line-Scan Camera, 600 kHz at 9K, 256 Stages Dhyana 9KTDI Pro — — —Contact