Gemini 16KTDI 16K BSI TDI sCMOS line-scan camera
WaveQuanta

Gemini 16KTDI BSI TDI sCMOS Line-Scan Camera, 500 kHz at 16K, 100G CoF

Gemini 16KTDI
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A 16K TDI line-scan camera for wide-field, high-speed industrial inspection.

The Gemini 16KTDI uses a back-illuminated TDI sCMOS sensor with a 16416-pixel line of 5 µm pixels and up to 256 stages, running at 500 kHz over a 100G CoaXPress-over-Fiber link. Visible (94.2% QE at 460 nm) and UV (70.76% QE at 266 nm) sensor versions are available. TES or HEX cooling lets the camera use the host equipment's airflow, which simplifies integration and maintenance.

Key Features

  • Three models: G16KTDI-TES-100G and G16KTDI-HEX-100G with the visible sensor (300–1100 nm), and G16KTDI-UV-HEX-100G with the UV sensor (180–1100 nm)
  • 16416-pixel line doubles the single-scan coverage of 8K platforms at the same 500 kHz line rate, reducing scan passes and stitching
  • Up to 256 TDI stages (P1) or 32 stages (P2) for low-light inspection
  • 100G CoF interface (QSFP28) with up to 100 Gbps on a single port
  • TES or HEX cooling can be embedded in equipment and connected to internal air ducts or exhaust, without external cooling
  • PRNU/DSNU correction with hundreds of parameters for scenario-based calibration
  • Anti-blooming ≥ 50× and 16 ke⁻ typical full-well capacity

Typical Applications

  • Wafer and semiconductor inspection
  • Advanced packaging inspection
  • Mask inspection
  • Flat-panel display (FPD) inspection
  • Lithium battery and web inspection
  • Gene sequencing

Related Products

  • Gemini 8KTDI LT — Compact TDI sCMOS Line-Scan Camera, 500 kHz at 8K, CXP-12
  • Gemini 8KTDI — BSI TDI sCMOS Line-Scan Camera, 1 MHz at 8K, 100G/40G CoF
  • Dhyana 9KTDI Pro — BSI TDI sCMOS Line-Scan Camera, 600 kHz at 9K, 256 Stages

Browse all: TDI Line-Scan Cameras · Cameras

Model: Gemini 16KTDI · Acquisition software and drivers are supplied with the camera. Contact WaveQuanta for a quote and lead time.

Sensor Type BSI sCMOS TDI
Sensor GLT5016BSI VIS (TES-100G, HEX-100G); GLT5016BSI UV (UV-HEX-100G)
Color / Mono Mono
Peak QE 94.2% @ 460 nm (VIS); 70.76% @ 266 nm (UV), typical
Spectral Range 300 nm to 1100 nm (VIS); 180 nm to 1100 nm (UV)
Resolution P1: 16416 pixels × 256 stages; P2: 16416 pixels × 32 stages
Pixel Size 5 µm × 5 µm
Array Diagonal 82 mm
Full-Well Capacity 16 ke⁻ (typical)
Readout Noise TES: 7.5 e⁻ @ 12 bit; HEX: 12.1 e⁻ @ 10 bit, 7.5 e⁻ @ 12 bit (typical)
Dynamic Range TES: 67 dB @ 12 bit; HEX: 63 dB @ 10 bit (typical)
Line Rate (TDI) 500 kHz @ 16K
TDI Stages P1: 4, 32, 64, 128, 192, 224, 252, 256; P2: 2, 4, 8, 16, 24, 28, 30, 32
Operation Mode TDI, area; scan direction forward, reverse or trigger-controlled
Binning 1 × 2, 2 × 2, 4 × 4, 8 × 8
ROI Supported
Cooling Method TES cooling (G16KTDI-TES-100G); HEX cooling (HEX-100G models)
Dark Current TES: 2500 e⁻/pixel/s @ 30°C; HEX: 540 e⁻/pixel/s @ 10°C (corrected)
DSNU / PRNU TES: 1.4 e⁻ / 0.018% @ 12 bit; HEX: 6.5 e⁻ / 0.15% @ 10 bit (corrected)
Data Interface QSFP28 (100G CoaXPress-over-Fiber)
Trigger Trigger input, scan direction input; strobe output (Hirose)
Optical Interface M90 / M95; customization available
Power Supply 21 V to 27 V
Power Consumption 120 W
Dimensions 117.5 mm × 140 mm × 92 mm (H × W × L)
Weight 3300 g
Operating Environment Working: 0°C to 40°C, 20–80% RH; storage: -20°C to 60°C; altitude up to 2000 m
Software / SDK C/C++ SDK; Windows 10/11 (x64), Ubuntu 20.04/22.04
Specification Sheet PDF — Download
No CAD drawings available for this product.
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Product Family: TDI Line-Scan Cameras (5 variants)

Product ▴▾ SKU Size ▴▾ Clear Aperture ▴▾ Operating Wavelength ▴▾
Gemini 8KTDI BSI TDI sCMOS Line-Scan Camera, 1 MHz at 8K, 100G/40G CoF Gemini 8KTDI — — —Contact
Gemini 16KTDI BSI TDI sCMOS Line-Scan Camera, 500 kHz at 16K, 100G CoF Current Gemini 16KTDI — — —
Gemini 8KTDI LT Compact TDI sCMOS Line-Scan Camera, 500 kHz at 8K, CXP-12 Gemini 8KTDI LT — — —Contact
Dhyana 9KTDI BSI TDI sCMOS Line-Scan Camera, 510 kHz at 9K, CXP-12 Dhyana 9KTDI — — —Contact
Dhyana 9KTDI Pro BSI TDI sCMOS Line-Scan Camera, 600 kHz at 9K, 256 Stages Dhyana 9KTDI Pro — — —Contact