HXP-824A hexapod positioner
WaveQuanta

HXP-824A High-Precision Hexapod, Six-Axis, ±34 mm XY Travel, EtherCAT

HXP-824A
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Six-degree-of-freedom hexapod for precision spatial alignment, micro-assembly and wafer inspection.

The HXP-824A is a high-precision hexapod for six-degree-of-freedom adjustment. Six push-rod actuators with double Hooke joints give a rigid, highly repeatable platform that can be mounted in any orientation. Actuators are available with absolute encoders, which retain position after power loss so no homing is needed on restart, or with incremental encoders; the drives communicate over EtherCAT for compatibility with mainstream motion control systems.

Key Features

  • Six push-rod actuators with double Hooke joints; can be mounted in any orientation
  • Travel ±34 mm (X, Y), ±15 mm (Z), ±11° (θX, θY), ±25° (θZ)
  • Unidirectional repeatability ±0.5 µm (X, Y), ±0.3 µm (Z); minimum incremental motion 1 µm and 0.001°
  • Absolute or incremental encoder actuators; absolute version keeps position after power-off
  • EtherCAT drive bus, compatible with mainstream motion control systems
  • Control software with Euler-angle conventions, world/workpiece/tool coordinate systems (64 workpiece and 64 tool frames), load simulation, spatial calibration, 3D pose simulation and teach programming
  • Software development kit for integration into equipment

Typical Applications

  • Spatial precision alignment
  • Micro-device processing and assembly
  • Optical communication device alignment
  • Wafer inspection

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Model: HXP-824A · Contact WaveQuanta for a quote, configuration advice and lead time.

Travel X, Y ±34 mm
Travel Z ±15 mm
Travel θX, θY ±11°
Travel θZ ±25°
Actuator Resolution 0.25 µm
Minimum Incremental Motion X, Y, Z 1 µm
Minimum Incremental Motion θX, θY, θZ 0.001°
Backlash X, Y / Z 3 µm / 1 µm
Backlash θX, θY / θZ 10 arcsec / 15 arcsec
Unidirectional Repeatability X, Y / Z ±0.5 µm / ±0.3 µm
Unidirectional Repeatability θX, θY / θZ ±2 arcsec / ±2.5 arcsec
Actuator Speed 40 mm/s standard; 80 mm/s max
Load Capacity 20 kg horizontal; 2.5 kg in any orientation
Structure Six push rods with double Hooke joints
Motor Step-servo motor
Encoder Absolute or incremental (selectable)
Drive Communication EtherCAT
Coordinate Systems World, workpiece (64), mounting, drive and tool (64) frames
Software Functions Load simulation, spatial calibration, 3D pose simulation, teach programming, SDK
Operating Temperature +10 to +40 °C
Body Material Stainless steel / aluminum alloy
Weight 7 kg
Cable Length 2 m
Specification Sheet PDF — Download
No CAD drawings available for this product.
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Product Family: Motorized Multi-Axis Stages (3 variants)

Product ▴▾ SKU Size ▴▾ Clear Aperture ▴▾ Operating Wavelength ▴▾
XYR Series Motorized XYθ Alignment Stages, ±4.5 to ±15 mm XY, ±5° Rotation XYR Series — — —Contact
XY Series All-in-One Motorized XY Stages, 50 or 120 mm Travel, Clear Aperture XY Series — — —Contact
HXP-824A High-Precision Hexapod, Six-Axis, ±34 mm XY Travel, EtherCAT Current HXP-824A — — —