Dhyana XF Open-front, vacuum-compatible BSI sCMOS camera series for soft X-ray and EUV
WaveQuanta

Dhyana XF Series Open-Front Soft X-ray sCMOS Camera, ~100% QE, 2K to 6K

Dhyana XF
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RoHS REACH

Open-front BSI sCMOS cameras on standard CF flanges for direct detection of soft X-ray and EUV photons.

The Dhyana XF series are cooled, high-speed sCMOS cameras that mount on a vacuum chamber through a standard CF flange, exposing a back-illuminated sensor without anti-reflection coating directly to the beam. A high-vacuum seal and vacuum-compatible materials allow use down to 10⁻⁷ Pa, and the sensors reach a QE close to 100% between 80 and 1000 eV for soft X-ray, EUV and VUV detection. The series shares one hardware platform across 2K, 4K and 6K sensor formats.

Key Features

  • Four sensor variants: XF95 (2048 × 2048, 11 µm), XF400BSI (2048 × 2048, 6.5 µm), XF4040BSI (4096 × 4096, 9 µm) and 6060BSI (6144 × 6144, 10 µm)
  • BSI sensors without anti-reflection coating: ~100% QE from 80 to 1000 eV, response from 200 to 1100 nm, and resistance to radiation damage in soft X-ray use
  • Rotatable flange aligns the sensor x-axis with the image or spectral axis; pixel (0,0) is marked on the housing; flange and sensor position can be customized
  • DN100CF (XF95, XF400BSI) or DN160CF (XF4040BSI) flange; vacuum compatible to 10⁻⁷ Pa
  • Frame rates up to 100 fps (XF400BSI, CameraLink), 48 fps (XF95) and 16.5 fps (XF4040BSI); the 6060BSI uses CoaXPress 2.0
  • Air or liquid cooling; dark current down to 0.02 e⁻/pixel/s at -40°C chip temperature (XF4040BSI)
  • Hardware and software triggering via SMA; support for LabVIEW, MATLAB and EPICS

Typical Applications

  • Fourier transform holography (FTH)
  • Soft X-ray ptychography
  • Small-angle X-ray scattering (SAXS)
  • High-harmonic generation (HHG) EUV detection
  • Soft X-ray scattering and spectroscopy
  • EUV spectroscopy

Related Products

  • Dhyana 201D — Compact FSI sCMOS Camera, 2048 × 1152, 6.5 µm Pixels, USB 3.0
  • Dhyana 2100 — Global-Shutter CMOS Camera, 5120 × 4096, 450 fps
  • Dhyana 400D — Cooled FSI sCMOS Camera, 2048 × 2048, 72% QE, USB 3.0

Browse all: sCMOS Cameras · Cameras

Model: Dhyana XF · Acquisition software and drivers are supplied with the camera. Contact WaveQuanta for a quote and lead time.

Sensor Type BSI sCMOS without anti-reflection coating (open-front)
Sensor XF95: GSENSE400BSI-PS
Peak QE ~100% (80–1000 eV)
Spectral Range 80–1000 eV; 200–1100 nm
Resolution XF95, XF400BSI: 2048 × 2048; XF4040BSI: 4096 × 4096; 6060BSI: 6144 × 6144
Pixel Size XF95: 11 µm; XF400BSI: 6.5 µm; XF4040BSI: 9 µm; 6060BSI: 10 µm
Effective Area XF95: 22.5 × 22.5 mm; XF400BSI: 13.3 × 13.3 mm; XF4040BSI: 36.9 × 36.9 mm
Array Diagonal XF95: 31.9 mm; XF400BSI: 18.8 mm; XF4040BSI: 52.1 mm
Full-Well Capacity XF95: 85 ke⁻; XF400BSI: 45 ke⁻; XF4040BSI: 37 ke⁻ (typical)
Readout Noise XF95: 1.6 e⁻; XF400BSI: 1.1 e⁻ (CMS); XF4040BSI: 2.8 e⁻ (typical, median)
Dynamic Range XF95: 90 dB; XF400BSI: 90 dB; XF4040BSI: 80 dB
Frame Rate (XF95) 48 fps (STD); 24 fps (HDR)
Frame Rate (XF400BSI) 100 fps @ CameraLink; 40 fps @ USB 3.0
Frame Rate (XF4040BSI) 16.5 fps @ CameraLink; 9.7 fps @ USB 3.0
Shutter Type Rolling (XF400BSI: rolling, global reset)
Exposure Time XF95: 21 µs–300 s; XF400BSI: 6.6 µs–300 s; XF4040BSI: 10 µs–3600 s
Binning 2 × 2, 4 × 4
ROI Supported
Cooling Method Air cooling, liquid cooling
Cooling Temperature XF95: -30°C @ 25°C ambient, -50°C @ 20°C water; others: 60°C below ambient
Dark Current XF95: 0.3; XF400BSI: 0.5; XF4040BSI: 0.02 e⁻/pixel/s (all @ -40°C chip)
DSNU / PRNU XF95, XF400BSI: 0.2 e⁻ / 0.3%; XF4040BSI: 0.5 e⁻ / 0.2%
Bit Depth 12 bit, 16 bit (XF400BSI also 11 bit)
Data Interface CameraLink, USB 3.0 (XF95: USB 3.0 over fiber); 6060BSI: CoaXPress 2.0
Trigger Hardware, software (SMA)
Vacuum Compatibility Up to 10⁻⁷ Pa
Flange Size DN100CF (XF95, XF400BSI), DN160CF (XF4040BSI); customization available
Power Supply 12 V / 8 A
Power Consumption XF95: < 65 W; XF4040BSI: ≤ 95 W
Dimensions XF95: 152.4 × 152.4 × 140.7 mm (H × W × L)
Weight XF95: ~3700 g; XF4040BSI: ~4300 g
Software / SDK Acquisition and analysis software, LabVIEW, MATLAB, EPICS; C/C++/C# SDK
Specification Sheet PDF — Download
No CAD drawings available for this product.
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Product Family: sCMOS Cameras (23 variants)

Product ▴▾ SKU Size ▴▾ Clear Aperture ▴▾ Operating Wavelength ▴▾
Libra 5514 Global Shutter BSI sCMOS Camera, 330 fps at 14 MP, 40G CoF Libra 5514 — — —Contact
Libra 3243 Pro Stacked BSI sCMOS Camera, 43 MP at 100 fps, 100G CoF Libra 3243 Pro — — —Contact
Libra 5514 Pro Global Shutter BSI sCMOS Camera, 670 fps at 14 MP, 100G CoF Libra 5514 Pro — — —Contact
Dhyana XV Series In-Vacuum Soft X-ray sCMOS Camera, 2K to 6K, 10⁻⁶ Pa Dhyana XV — — —Contact
Dhyana XF Series Open-Front Soft X-ray sCMOS Camera, ~100% QE, 2K to 6K Current Dhyana XF — — —
Dhyana 6060 Large-Format FSI sCMOS Camera, 6144 × 6144, 44 fps Dhyana 6060 — — —Contact
Dhyana 95 V2 BSI sCMOS Camera, 95% QE, 11 µm Pixels Dhyana 95 V2 — — —Contact
Dhyana 4040 V2 Large-Format FSI sCMOS Camera, 4096 × 4096, 70 ke⁻ Full Well Dhyana 4040 V2 — — —Contact
Dhyana 4040BSI Large-Format BSI sCMOS Camera, 4096 × 4096, 90% QE Dhyana 4040BSI — — —Contact
Dhyana 6060BSI Large-Format BSI sCMOS Camera, 6144 × 6144, 95% QE Dhyana 6060BSI — — —Contact
Dhyana 401A-G Compact FSI sCMOS Camera, 11 µm Pixels, 91 ke⁻ Full Well Dhyana 401A-G — — —Contact
Dhyana 401D Compact FSI sCMOS Camera, 2048 × 2048, 6.5 µm Pixels, USB 3.0 Dhyana 401D — — —Contact
Dhyana 400DC Cooled Color sCMOS Camera, 2048 × 2048, 16-bit, USB 3.0 Dhyana 400DC — — —Contact
Dhyana 400D Cooled FSI sCMOS Camera, 2048 × 2048, 72% QE, USB 3.0 Dhyana 400D — — —Contact
Dhyana 2100 Global-Shutter CMOS Camera, 5120 × 4096, 450 fps Dhyana 2100 — — —Contact
Dhyana 201D Compact FSI sCMOS Camera, 2048 × 1152, 6.5 µm Pixels, USB 3.0 Dhyana 201D — — —Contact
Aries 6510 BSI sCMOS Camera, 29.4 mm Diagonal, 150 fps, 0.7 e⁻ Noise Aries 6510 — — —Contact
Aries 6506 BSI sCMOS Camera, 22 mm Diagonal, 200 fps, 0.7 e⁻ Noise Aries 6506 — — —Contact
Aries 6504 BSI sCMOS Camera, 0.8 e⁻ Read Noise, 297 fps @ 4.2 MP Aries 6504 — — —Contact
Aries 6504 Pro BSI sCMOS Camera, 0.43 e⁻ RMS Read Noise, 297 fps Aries 6504 Pro — — —Contact
Aries 16 LT BSI sCMOS Camera, 16 µm Pixels, 0.9 e⁻ Read Noise Aries 16 LT — — —Contact
Aries 6504 LT Compact BSI sCMOS Camera, 0.8 e⁻ Read Noise, 100 fps Aries 6504 LT — — —Contact
Aries 1517 Vacuum-Cooled BSI sCMOS Camera, 87 mm Diagonal, 15 µm Pixels Aries 1517 — — —Contact