Dhyana XV In-vacuum BSI sCMOS camera series for soft X-ray and EUV
WaveQuanta

Dhyana XV Series In-Vacuum Soft X-ray sCMOS Camera, 2K to 6K, 10⁻⁶ Pa

Dhyana XV
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Liquid-cooled BSI sCMOS cameras that operate inside the vacuum chamber for direct soft X-ray and EUV detection.

The Dhyana XV series are sCMOS cameras designed to work entirely inside a high-vacuum chamber, down to 10⁻⁶ Pa, so the detector can be positioned where the experiment needs it. Back-illuminated sensors detect soft X-ray photons directly, data leave the chamber over fiber to USB 3.0 through a DN100CF feedthrough, and liquid cooling keeps dark current low. The series covers 2K, 4K and 6K sensor formats on one hardware platform.

Key Features

  • Four sensor variants: XV95 (2048 × 2048, 11 µm), XV400BSI (2048 × 2048, 6.5 µm), XV4040BSI (4096 × 4096, 9 µm) and XV6060BSI (6144 × 6144, 10 µm)
  • Every camera is tested in vacuum together with its liquid cooling lines, feedthroughs and electrical cables
  • Specified peak QE of ~100% from 80 to 1000 eV, plus response from 200 to 1100 nm
  • Fiber-to-USB 3.0 data link with the fiber routed inside the vacuum; feedthrough DN100CF flange, customizable
  • Vacuum compatible to 10⁻⁶ Pa; XV95 bake-out temperature below 70°C
  • Liquid cooling; dark current down to 0.01 e⁻/pixel/s at -45°C (XV4040BSI)
  • Frame rates up to 48 fps (XV95), 40 fps (XV400BSI) and 9.7 fps (XV4040BSI); SDK for C, C++, C# and Python

Typical Applications

  • Fourier transform holography (FTH)
  • Soft X-ray ptychography
  • Small-angle X-ray scattering (SAXS)
  • High-harmonic generation (HHG) EUV detection
  • Soft X-ray scattering and spectroscopy
  • EUV spectroscopy

Related Products

  • Dhyana 201D — Compact FSI sCMOS Camera, 2048 × 1152, 6.5 µm Pixels, USB 3.0
  • Dhyana 2100 — Global-Shutter CMOS Camera, 5120 × 4096, 450 fps
  • Dhyana 400D — Cooled FSI sCMOS Camera, 2048 × 2048, 72% QE, USB 3.0

Browse all: sCMOS Cameras · Cameras

Model: Dhyana XV · Acquisition software and drivers are supplied with the camera. Contact WaveQuanta for a quote and lead time.

Sensor Type Standard BSI sCMOS (in-vacuum)
Sensor XV95: GSENSE400BSI
Peak QE ~100% (80–1000 eV)
Spectral Range 80–1000 eV; 200–1100 nm
Resolution XV95, XV400BSI: 2048 × 2048; XV4040BSI: 4096 × 4096; XV6060BSI: 6144 × 6144
Pixel Size XV95: 11 µm; XV400BSI: 6.5 µm; XV4040BSI: 9 µm; XV6060BSI: 10 µm
Effective Area XV95: 22.5 × 22.5 mm; XV400BSI: 13.3 × 13.3 mm; XV4040BSI: 36.9 × 36.9 mm
Array Diagonal XV95: 31.9 mm; XV400BSI: 18.8 mm; XV4040BSI: 52.1 mm
Full-Well Capacity XV95: 85 ke⁻; XV400BSI: 45 ke⁻; XV4040BSI: 37 ke⁻ (typical)
Readout Noise XV95: 1.6 e⁻; XV400BSI: 1.1 e⁻ (CMS); XV4040BSI: 2.8 e⁻ (typical, median)
Dynamic Range XV95: 90 dB; XV400BSI: 90 dB; XV4040BSI: 80 dB
Frame Rate XV95: 48 fps (STD), 24 fps (HDR); XV400BSI: 40 fps; XV4040BSI: 9.7 fps
Shutter Type Rolling (XV400BSI: rolling, global reset)
Exposure Time XV95: 21 µs–300 s; XV400BSI: 6.6 µs–300 s; XV4040BSI: 10 µs–3600 s
Binning 2 × 2, 4 × 4
ROI Supported
Cooling Method Liquid cooling
Cooling Temperature XV95: -45°C @ 20°C water; XV400BSI, XV4040BSI: 60°C below ambient
Dark Current XV95: 0.3 / XV400BSI: 0.5 e⁻/pixel/s @ -40°C; XV4040BSI: 0.01 @ -45°C
DSNU / PRNU XV95, XV400BSI: 0.2 e⁻ / 0.3%; XV4040BSI: 0.5 e⁻ / 0.2%
Bit Depth 12 bit, 16 bit (XV400BSI also 11 bit)
Data Interface USB 3.0 over fiber (fiber inside the vacuum)
Trigger Hardware, software (Hirose)
Vacuum Compatibility Up to 10⁻⁶ Pa
Flange Size Feedthrough DN100CF; customization available
Power Supply AC power
Power Consumption XV95: < 65 W (incl. control box); XV4040BSI: ≤ 63 W
Dimensions XV95: 110 × 110 × 191 mm (H × W × L)
Weight XV95: ~2600 g (camera body); XV400BSI: ~2600 g; XV4040BSI: ~3100 g
Operating Environment XV95: 0°C to 40°C, 0–70% RH non-condensing; bake-out below 70°C
Software / SDK Acquisition and analysis software, LabVIEW, MATLAB, EPICS; C/C++/C#/Python SDK
Specification Sheet PDF — Download
No CAD drawings available for this product.
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Product Family: sCMOS Cameras (23 variants)

Product ▴▾ SKU Size ▴▾ Clear Aperture ▴▾ Operating Wavelength ▴▾
Libra 5514 Global Shutter BSI sCMOS Camera, 330 fps at 14 MP, 40G CoF Libra 5514 — — —Contact
Libra 3243 Pro Stacked BSI sCMOS Camera, 43 MP at 100 fps, 100G CoF Libra 3243 Pro — — —Contact
Libra 5514 Pro Global Shutter BSI sCMOS Camera, 670 fps at 14 MP, 100G CoF Libra 5514 Pro — — —Contact
Dhyana XV Series In-Vacuum Soft X-ray sCMOS Camera, 2K to 6K, 10⁻⁶ Pa Current Dhyana XV — — —
Dhyana XF Series Open-Front Soft X-ray sCMOS Camera, ~100% QE, 2K to 6K Dhyana XF — — —Contact
Dhyana 6060 Large-Format FSI sCMOS Camera, 6144 × 6144, 44 fps Dhyana 6060 — — —Contact
Dhyana 95 V2 BSI sCMOS Camera, 95% QE, 11 µm Pixels Dhyana 95 V2 — — —Contact
Dhyana 4040 V2 Large-Format FSI sCMOS Camera, 4096 × 4096, 70 ke⁻ Full Well Dhyana 4040 V2 — — —Contact
Dhyana 4040BSI Large-Format BSI sCMOS Camera, 4096 × 4096, 90% QE Dhyana 4040BSI — — —Contact
Dhyana 6060BSI Large-Format BSI sCMOS Camera, 6144 × 6144, 95% QE Dhyana 6060BSI — — —Contact
Dhyana 401A-G Compact FSI sCMOS Camera, 11 µm Pixels, 91 ke⁻ Full Well Dhyana 401A-G — — —Contact
Dhyana 401D Compact FSI sCMOS Camera, 2048 × 2048, 6.5 µm Pixels, USB 3.0 Dhyana 401D — — —Contact
Dhyana 400DC Cooled Color sCMOS Camera, 2048 × 2048, 16-bit, USB 3.0 Dhyana 400DC — — —Contact
Dhyana 400D Cooled FSI sCMOS Camera, 2048 × 2048, 72% QE, USB 3.0 Dhyana 400D — — —Contact
Dhyana 2100 Global-Shutter CMOS Camera, 5120 × 4096, 450 fps Dhyana 2100 — — —Contact
Dhyana 201D Compact FSI sCMOS Camera, 2048 × 1152, 6.5 µm Pixels, USB 3.0 Dhyana 201D — — —Contact
Aries 6510 BSI sCMOS Camera, 29.4 mm Diagonal, 150 fps, 0.7 e⁻ Noise Aries 6510 — — —Contact
Aries 6506 BSI sCMOS Camera, 22 mm Diagonal, 200 fps, 0.7 e⁻ Noise Aries 6506 — — —Contact
Aries 6504 BSI sCMOS Camera, 0.8 e⁻ Read Noise, 297 fps @ 4.2 MP Aries 6504 — — —Contact
Aries 6504 Pro BSI sCMOS Camera, 0.43 e⁻ RMS Read Noise, 297 fps Aries 6504 Pro — — —Contact
Aries 16 LT BSI sCMOS Camera, 16 µm Pixels, 0.9 e⁻ Read Noise Aries 16 LT — — —Contact
Aries 6504 LT Compact BSI sCMOS Camera, 0.8 e⁻ Read Noise, 100 fps Aries 6504 LT — — —Contact
Aries 1517 Vacuum-Cooled BSI sCMOS Camera, 87 mm Diagonal, 15 µm Pixels Aries 1517 — — —Contact