Libra UV UV-enhanced global shutter mono CMOS camera (10 GigE)
WaveQuanta

Libra UV UV-Enhanced Global Shutter CMOS Camera, 200–1000 nm, 10 GigE

Libra UV
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A UV-sensitive 8.1 MP global shutter camera for high-speed semiconductor inspection and UV spectral imaging.

The Libra UV is built around the Sony IMX487 sensor, giving a 200–1000 nm response with 48% QE at 365 nm and 56% QE at 500 nm. Full 8.1 MP frames are transferred over 10 GigE at up to 152 fps, and the camera is used in front-end wafer inspection, mask alignment, wafer bonding and back-end packaging defect detection.

Key Features

  • Sony IMX487 sensor covering 200–1000 nm, with 48% QE at 365 nm and 56% QE at 500 nm
  • Full 8.1 MP (2856 × 2848) resolution at 152 fps (8-bit) and 100 fps (10-bit and 12-bit)
  • Global shutter captures fast-moving samples without motion artifacts
  • 10 GigE interface with uncompressed transfer and flexible cabling; PoE supported
  • Readout noise down to 1.5 e⁻ RMS and dynamic range up to 72 dB (12-bit)
  • Sum and average binning (1 × 2, 2 × 1) plus 2 × 2 sum binning; ROI and 1 µs timestamps
  • Compact 45 × 45 × 74.3 mm body for embedding in inspection tools and optical systems

Typical Applications

  • Patterned wafer inspection
  • Mask alignment and wafer bonding
  • Semiconductor packaging defect detection
  • Material classification and infrastructure testing
  • Bio-spectral analysis and medical diagnostics
  • Precision electronics inspection

Related Products

  • Libra 16 — Large-FOV Cooled Mono CMOS Camera, 16 mm, 1500 × 1500, 92% QE
  • Libra 22 — Large-FOV Cooled Mono CMOS Camera, 22 mm, 2048 × 2048, 92% QE
  • Libra 25 — Large-FOV Cooled Mono CMOS Camera, 25 mm, 2600 × 2048, 92% QE

Browse all: Scientific Research Camera · Cameras

Model: Libra UV · Acquisition software and drivers are supplied with the camera. Contact WaveQuanta for a quote and lead time.

Sensor Type CMOS
Sensor Sony IMX487
Color / Mono Mono
Peak QE 56% @ 500 nm; 48% @ 365 nm
Spectral Range 200–1000 nm (UV/visible)
Resolution 2856 × 2848 (8.1 MP)
Pixel Size 2.74 µm × 2.74 µm
Effective Area 7.8 mm × 7.8 mm
Array Diagonal 11 mm (2/3")
Gain Analog 1–15.7; digital 15.8–126
Full-Well Capacity (10-bit) 9000 e⁻ @ gain 1; 580 e⁻ @ gain 15.7
Full-Well Capacity (12-bit) 9250 e⁻ @ gain 1; 555 e⁻ @ gain 15.7
Readout Noise (10-bit) 3.9 e⁻ RMS @ gain 1; 2.1 e⁻ RMS @ gain 15.7
Readout Noise (12-bit) 2.4 e⁻ RMS @ gain 1; 1.5 e⁻ RMS @ gain 15.7
Dynamic Range (10-bit) 65 dB @ gain 1; 49.1 dB @ gain 15.7
Dynamic Range (12-bit) 72 dB @ gain 1; 52 dB @ gain 15.7
Frame Rate 152 fps @ 8-bit, 100 fps @ 10-bit, 100 fps @ 12-bit (full resolution)
Shutter Type Global
Exposure Time 8-bit: 2 µs – 10 s; 10/12-bit: 3 µs – 10 s
Binning 1 × 2 (avg/sum), 2 × 1 (avg/sum), 2 × 2 (sum)
ROI Supported
DSNU / PRNU 0.38 e⁻ / 0.52%
Bit Depth 8-bit, 10-bit, 12-bit
Data Interface 10 GigE
Trigger Hardware, software; Hirose 12-pin connector
Trigger Output High, Low, Trigger Ready, Readout, Exposure Out
Optical Interface C-mount
Power Supply 12 V / 2 A, PoE supported
Power Consumption ≤ 12 W
Dimensions 45 mm (H) × 45 mm (W) × 74.3 mm (L)
Operating Environment Operating 0 to 40 °C, 10–85% RH; storage −10 to 60 °C, 0–85% RH
Software / SDK Support SDK: C, C++, C#, Python; Windows, OpenEuler
Specification Sheet PDF — Download
No CAD drawings available for this product.
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Product Family: Scientific Research Camera (37 variants)

Product ▴▾ SKU Size ▴▾ Clear Aperture ▴▾ Operating Wavelength ▴▾
Libra 536 Global Shutter Mono CMOS Camera, 8.1 MP, 152 fps, 10 GigE Libra 536 — — —Contact
Libra UV UV-Enhanced Global Shutter CMOS Camera, 200–1000 nm, 10 GigE Current Libra UV — — —
Libra 3412UM Global Shutter Mono CMOS Camera, 12 MP, USB 3.0 Libra 3412UM — — —Contact
Libra 3412M Air-Cooled Global Shutter Mono CMOS Camera, 12 MP, 10 GigE Libra 3412M — — —Contact
Libra 3412UC Global Shutter Color CMOS Camera, 12 MP, USB 3.0 Libra 3412UC — — —Contact
Libra 3412C Global Shutter Color CMOS Camera, 12 MP, 96 fps, 10 GigE Libra 3412C — — —Contact
Libra 3405UC Global Shutter Color CMOS Camera, 5 MP, 65 fps, USB 3.0 Libra 3405UC — — —Contact
Libra 3405UM Global Shutter Mono CMOS Camera, 5 MP, 65 fps, USB 3.0 Libra 3405UM — — —Contact
Libra 3405C Global Shutter Color CMOS Camera, 5 MP, 163 fps, 10 GigE Libra 3405C — — —Contact
Libra 3405M Global Shutter Mono CMOS Camera, 5 MP, 163 fps, 10 GigE Libra 3405M — — —Contact
Libra 25 Large-FOV Cooled Mono CMOS Camera, 25 mm, 2600 × 2048, 92% QE Libra 25 — — —Contact
Libra 22 Large-FOV Cooled Mono CMOS Camera, 22 mm, 2048 × 2048, 92% QE Libra 22 — — —Contact
Libra 16 Large-FOV Cooled Mono CMOS Camera, 16 mm, 1500 × 1500, 92% QE Libra 16 — — —Contact
FL 9BW Long-Exposure Cooled Mono CMOS Camera, 9 MP, 3000 × 3000 FL 9BW — — —Contact
FL 26BW Long-Exposure Cooled Mono CMOS Camera, 1.8-inch, 6240 × 4168 FL 26BW — — —Contact
FL 20BW Mono Cooled CMOS Camera, 20 MP, 84% QE FL 20BW — — —Contact
FL 20 Cooled Color CMOS Camera, 20 MP, 1-inch Sensor, USB 3.0 FL 20 — — —Contact
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