Phasics
SID4 UV HR Wavefront Sensor
PHA-SID4-UVHRContact for pricing
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The Phasics SID4 UV HR is a high resolution UV wavefront sensor covering 190–400 nm. With 512 x 512 sampling across a large 13.3 mm pupil, it delivers exceptional spatial resolution for demanding UV optical metrology applications.
Key Features
- UV range: 190–400 nm
- High resolution (512 x 512 sampling)
- Large pupil (13.3 x 13.3 mm)
Applications
- DUV/EUV optics characterization
- Large aperture UV element testing
- Semiconductor lithography optics
| Wavelength Range | 190 - 400 nm |
| Aperture Dimension | 13.3 x 13.3 mm² |
| Spatial Resolution | 26 µm |
| Phase & Intensity Sampling | 512 x 512 |
| Phase Resolution | <2 nm RMS |
| Absolute Accuracy | 20 nm RMS |
| Frame Rate | 10 fps |
| Real-time Processing Frequency | 3 Hz (full resolution) |
| Interface | GigE |
| Dimensions (W×H×L) | 80.3 x 78.6 x 108.2 mm³ |
| Weight | ~600 g |
| Key Features | High resolution, Large pupil, Large dynamic range |
No CAD drawings available for this product.
Product Family: Wavefront Sensors (Phasics) (18 variants)
| Product | SKU | Size | Clear Aperture | Operating Wavelength | |
|---|---|---|---|---|---|
| Kaleo Kit Modular Wavefront Metrology Solution |
PHA-KALEO-KIT
| — | — | — | Contact |
| R-Cube Illumination Module |
PHA-RCUBE
| — | — | — | Contact |
| Kalas Large Beam Analyzer |
PHA-KALAS
| — | — | — | Contact |
| Kaleo MultiWAVE Interferometer |
PHA-KALEO-MW
| 5.1 inches (130 mm) | 5.1 inches (130 mm) | 193 nm to 14 µm (custom wavelengths available) | Contact |
| Kaleo MTF Automated Measurement Station |
PHA-KALEO-MTF
| — | — | — | Contact |
| SID4 Bio Quantitative Phase Imaging Camera |
PHA-SID4-BIO
| — | — | 400 - 1100 nm | Contact |
| SID4 sC8 Quantitative Phase Imaging Camera |
PHA-SID4-SC8
| — | — | 400 - 1050 nm | Contact |
| SID4 DWIR Infrared Wavefront Sensor |
PHA-SID4-DWIR
| — | — | 3 - 5 µm and 8 - 14 µm | Contact |
| SID4 eSWIR HR Wavefront Sensor |
PHA-SID4-ESWIRHR
| — | — | 1.4 - 2.1 µm | Contact |
| SID4 eSWIR Wavefront Sensor |
PHA-SID4-ESWIR
| — | — | 1.4 - 2.1 µm | Contact |
| SID4 SWIR HR Wavefront Sensor |
PHA-SID4-SWIRHR
| — | — | 0.9 - 1.7 µm | Contact |
| SID4 SWIR Wavefront Sensor |
PHA-SID4-SWIR
| — | — | 0.9 - 1.7 µm | Contact |
| SID4 UV HR Wavefront Sensor Current |
PHA-SID4-UVHR
| — | — | 190 - 400 nm | |
| SID4 UV Wavefront Sensor |
PHA-SID4-UV
| — | — | 190 - 400 nm | Contact |
| SID4 HR V Vacuum Wavefront Sensor |
PHA-SID4-HRV
| — | — | 400 - 1100 nm | Contact |
| SID4 UHR Wavefront Sensor |
PHA-SID4-UHR
| — | — | 400 - 1100 nm | Contact |
| SID4 HR Wavefront Sensor |
PHA-SID4-HR
| — | — | 400 - 1100 nm | Contact |
| SID4 Wavefront Sensor |
PHA-SID4
| — | — | 400 - 1100 nm | Contact |