Precilasers
313nm-325nm Narrow linewidth laser
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313nm-325nm Narrow linewidth laser Based on single frequency seed laser,low noise fiber amplifier and high efficiency frequency convert technique, Precilasers can provide narrow linewidth 313-325nm CW lasers, maximum output power is 2W,features with high frequency stability,long life and good beam quality.
Features
- Narrow Linewidth High Power
- Good Beam Quality Never
- Mod Hop
Applications
- Precision Measurement Wafer Metrology
- Interference Lithography
| Models | FL-SF-X-Y-CW |
|---|---|
| Wavelength Range | 313nm-325nm, center wavelength can be selected |
| Linewidth(100 us integration ) | <40kHz |
| Operational Mode | CW |
| Output Power | >300mW / >1W / >2W |
| Beam Diameter | 1±0.15 mm |
| Beam Waist Location | output aperture±0.5m |
| Beam Divergence (full angle) | <0.6mrad |
| Beam Circularity | 0.9-1.1 |
| Beam Pointing Stability (P-P) | <50µrad@3h |
| Beam Quality | TEM00, M²<1.2 |
| Polarization | linear, Vertical, ±3°, >20dB |
| Power Stability | <0.75% @3hours, RMS |
| Relative Intensity Noise | <0.2%(RMS, 10Hz-10MHz integration) |
| Cooling | Water cooling |
| Cold Start | <2 hours |
| Warm Start | <15 minutes |
| Controller Size | ≤483mm x 520mm x 132mm |
| Laser Head Size | ≤390mm x 310mm x 130mm |
| Chiller Size | ≤58cm x 29cm x 52cm |
| Laser Head Weight | ≤18kg |
| Controller Weight | ≤20kg |
| Chiller Weight | ≤25kg |
| Cable Length Between Laser And Controller | fiber length>1.5m |
| Operating Temperature (No condensing) | 15-35 °C (water cooling) |
| Power Supply | 100V-240V, AC, 50/60Hz |
| Power Consumption | <170W / <200W / <240W |
| Communication | RS422 |
Source: Precilasers manufacturer datasheet. Download the brochure (PDF) from the Documents tab for full details.
No CAD drawings available for this product.
