Precilasers
313nm Laser
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313nm Laser Based on single frequency seed laser,low noise fiber amplifier and high efficiency frequency convert technique, Precilasers can provide narrow linewidth 313nm CW lasers, maximum output power is 2W,features with high frequency stability,long life and good beam quality.
Features
- Narrow Linewidth High Power
- Good Beam Quality Never
- Mod Hop
Applications
- Precision Measurement Wafer Metrology
- Interference Lithography
| Models | FL-SF-X-Y-CW |
|---|---|
| Wavelength Range | 313nm-325nm, center wavelength can be selected |
| Linewidth(100 us integration ) | <40kHz |
| Operational Mode | CW |
| Output Power | >300mW / >1W / >2W |
| Beam Diameter | 1±0.15 mm |
| Beam Waist Location | output aperture±0.5m |
| Beam Divergence (full angle) | <0.6mrad |
| Beam Circularity | 0.9-1.1 |
| Beam Pointing Stability (P-P) | <50µrad@3h |
| Beam Quality | TEM00, M²<1.2 |
| Polarization | linear, Vertical, ±3°, >20dB |
| Power Stability | <0.75% @3hours, RMS |
| Relative Intensity Noise | <0.2%(RMS, 10Hz-10MHz integration) |
| Cooling | Water cooling |
| Cold Start | <2 hours |
| Warm Start | <15 minutes |
| Controller Size | ≤483mm x 520mm x 132mm |
| Laser Head Size | ≤390mm x 310mm x 130mm |
| Chiller Size | ≤58cm x 29cm x 52cm |
| Laser Head Weight | ≤18kg |
| Controller Weight | ≤20kg |
| Chiller Weight | ≤25kg |
| Cable Length Between Laser And Controller | fiber length>1.5m |
| Operating Temperature (No condensing) | 15-35 °C (water cooling) |
| Power Supply | 100V-240V, AC, 50/60Hz |
| Power Consumption | <170W / <200W / <240W |
| Communication | RS422 |
Source: Precilasers manufacturer datasheet. Download the brochure (PDF) from the Documents tab for full details.
No CAD drawings available for this product.
